Abstract
Simulations of surface Brillouin scattering (SBS) spectra of TiN, TiAlN, TiC and SiC thin hard films on silicon and diamond substrates have been carried out over a range of film thickness from 5nm to 1000nm. The simulations are based on the elastodynamic Green's function method that predicts the surface displacement amplitudes of acoustic phonons. These simulations provide information essential to understand and analyze experimental data emerging from SBS experiments currently in progress. There are striking differences in the simulated SBS spectra depending on the respective elastic properties of the film and the substrate. In fast on slow situations, the Rayleigh mode is accompanied by broadened resonances; in slow on fast situations, several orders of Sezawa modes are observed together with the Rayleigh mode and sharper resonances. In each case, use of a diamond substrate clearly provides optimal slow on fast conditions. Experimental studies are on process to demonstrate these effects. The velocity dispersion of the modes as a function of the product of surface wavevector and thickness (k//d) has also been simulated, allowing the elastic constants of the films to be determined.
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