Surface and subsurface microscopic characteristics in sapphire ultra-precision grinding

Abstract

To investigate surface and subsurface microscopic characteristics, the ultra-precision grinding experiments of sapphire were carried out by the minimal parameter cycle method. The effects of grinding wheel grit sizes and grinding cycles number on surface and subsurface characteristics were investigated. It was confirmed that the full ductile damage-free surface with Sa10nm can be achieved, and the microscopic characteristics of rough grinding and ultra-precision grinding surfaces are different. The effect of abrasive particle size on surface roughness and grinding wheel profile wear was discussed. Moreover, the subsurface characteristics were surveyed through molten KOH corrosion, the subsurface marks and subsurface damage were observed. The subsurface damage was dominated by median cracks, it can be observed under the ductile surfaces.