Abstract
After a brief survey of surface and interface analysis methods, selected methods are discussed, emphasizing the following aspects: (i) analysis of surface morphology [transmission electron microscopy (TEM), scanning electron microscopy (SEM), scanning tunneling microscopy (STM), atomic force microscopy (AFM)], (ii) analysis of surface elemental composition (and often compounds) [X‐ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES), sputter depth profiling, ion scattering spectroscopy (ISS), secondary ion mass spectrometry (SIMS)], and (iii) analysis of surface molecular composition and structure [Fourier transform infrared spectroscopy (FTIR) and infrared reflection–absorption spectroscopy (IRRAS)].
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