Surface and depth distribution of components in high alloy stainless steel using secondary ion mass spectrometry

Abstract

The direct imaging and depth sensitive analysis capabilities of secondary ion mass spectrometry were effectively utilized for surface and depth distribution analysis of major and trace elements (C, Si, Cr, Mn, Fe, Ni, Co and Mo) in high alloy stainless steel sample. Oxygen (O2+) primary ion beam with positive secondary ion detection mode was selected for surface and depth distribution analysis of elements in stainless steel sample. Qualitative surface distributions of the elements were obtained by area line scan analysis constructed from surface ion distribution images. 3D analyses were also carried out using O2+ primary ion beam in order to investigate spatial distribution of the elements. Surface ion distribution images, 3D analysis and area line scan analysis confirmed the non homogenous spatial distribution of Si and C while other elements Cr, Mn, Fe, Ni, Co and Mo were homogenously distributed over the surface as well as with respect to depth. The non homogenous spatial distribution of Si and C may be due to formation of carbide or precipitates of Si and C. Depth distribution analysis showed uniform depth distribution of all the elements including C and Si within the analysis area of 150μm×150μm.