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Abstract
Bombardment of solids with polyatomic projectiles (e.g., Cs 2I +) results in high secondary ion (SI) yields. For projectiles of 5–30 keV, SI yields as high as 10% have been observed; they are up to 50 times higher than those obtained with equal velocity monoatomic ions. Our data show that the SI yields increase with the mass of the projectile and its velocity. The SIs are identified by TOF-MS in an event-by-event counting mode, allowing the study of sputtering phenomena in the limit of a single projectile-target interaction. Moreover, the SIs emitted from a single primary ion impact can be acquired in a coincidence mode, i.e., the masses which are desorbed together from a primary impact site can be identified.
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Schedule a callMore From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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