Surface analysis with high energy time-of-flight secondary ion mass spectrometry measured in parallel with PIXE and RBS

Abstract

Abstract The Surrey Ion Beam Centre (IBC) is routinely using focused MeV primary ions to generate two-dimensional molecular maps using time-of-flight secondary ion mass spectrometry (ToF-SIMS) collected simultaneously with particle induced X-ray emission (PIXE) and Rutherford backscattering (RBS) spectra. Measurements made with the ToF-SIMS, PIXE, and RBS device with a focused and scanned MeV primary ion beam provide a more complete elemental and molecular evaluation of the target sample’s surface. In this paper, we explore the use of high electronic energy loss by MeV primary ions in the surface region of the target as a method for generating molecular images of the surface. We provide analyses of the relative secondary ion yield of leucine molecules as a function of primary ion velocity using MeV primary ions. We also demonstrate our ability to collect PIXE, RBS, and ToF-SIMS images generated using the same MeV primary ion.