Abstract

Layered semiconductor compounds represent alternative electronic materials beyond graphene. WSe2 is one of the two-dimensional materials with wide potential in opto- and nanoelectronics and is often used to construct novel three-dimensional architectures with new functionalities. Here, we report the topography and the electronic property of the WSe2 characterized by means of scanning tunneling microscopy and spectroscopy (STM and STS), X-ray photoelectron spectroscopy (XPS), and inductively coupled plasma mass spectrometry. The STM images reveal the presence of atomic-size imperfections and a variation in the electronic structure caused by the presence of defects and impurities below the detection limit of XPS. Both STS and photoemission reveal a spatial variation in the Fermi level position. The analysis of the core levels indicates the presence of different doping levels. The presence of a large concentration of defects and impurities has a strong impact on the electronic properties of the WSe2 surface. Our findings demonstrate that the growth of controllable and high quality two-dimensional materials at nanometer scale is one of the most challenging tasks that requires further attention.

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