Abstract
The physical and instrumental background of commercially available surface analytical techniques based on electron spectroscopy and mass spectrometry are briefly described. Their application to the characterization of nanoscopic structures and material properties is elucidated by a number of practical and technologically important examples. Because of its extremely high depth resolution Secondary Neutral Mass Spectrometry as a more recent technique is particularly considered as well as the identification of solid phases in nanoscaled thin film structures.
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