Abstract
The technique of imaging hydrogen concentration on solid surface by scanning electron-stimulated desorption spectroscopy has been reported. Improvement of an electron gun makes it possible to realize higher resolution imaging of H+ ions from copper mesh compared to that of our previous work. Although primary current is lower than 1 nA due to a thermal field emission gun, it produces a fine beam 300 nm in diameter at primary energy of 800 eV. Here, we show two-dimensional images of hydrogen ions of which the lateral resolution is less than 1 µm on copper mesh and on an integrated circuit.
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