Abstract
The propagation properties of surface acoustic waves (SAWs) in semi-insulating Fe-doped GaN films grown on sapphire substrates by hydride vapor phase epitaxy are investigated. Compared with native n-type GaN, Fe-doped GaN exhibits a higher electromechanical coupling coefficient due to its high electrical resistivity. In addition, guided longitudinal leaky surface acoustic wave (LLSAW) was observed experimentally with a very high phase velocity (about 7890 m/s), and this mode was verified by numerical simulations. The small propagation attenuation of LLSAW along liquid/solid interfaces was demonstrated in glycerol solutions, which implies the potential applications in high-frequency chemical sensing.
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