Abstract
Surface acoustic wave sensors consisting of delay lines built on quartz are used for measuring PM10 and PM2.5 particle concentration. The sensors operating at 125MHz are based on Love waves and use silica as guiding layer. Particles separation based on their sizes was achieved using a 3 lpm personal cascade impactor. The latter was designed to integrate the SAW sensors mounted on printed circuit boards. The sensors are monitored using a phase shift measurement. Filtered particles impact on the acoustic sensor's surface causing a gravimetric effect that changes the acoustic wave propagation conditions. This induces a phase down-shift which allows the measurement of the mass deposited on the sensors. SAW sensors were exposed to PM2.5 and PM10 particles generated from a soldering iron. Particle concentration was monitored in parallel using optical counters. Our SAW sensors proved to be able to detect PM10 and PM2.5 particles in the 0-400 μg/m3 concentration range.
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