Abstract
A surface acoustic wave (SAW) relative humidity (RH) sensor based on graphene oxide (GO)/TiO2 composite sensitive film was prepared. A uniform TiO2 film was deposited on the surface of a SAW resonator by DC reaction sputtering to get a TiO2/SAW sensor. The GO was coated onto the TiO2/SAW by drop-coated to construct the GO/TiO2/SAW sensor. The large specific surface area, abundant hydrophilic functional groups, and highly stable structure of the GO/TiO2 sensitive film are benefit to the improvement of the sensor performances. The prepared GO/TiO2/SAW sensor demonstrated excellent sensitive performances for practical applications, including high sensitivity, fast response and recovery, good repeatability, and good stability.
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