Abstract
In an energy recovery type surface acoustic wave motor, an increase in energy efficiency at the time of energy recovery and supply is achieved by adjusting phase change. A surface acoustic wave motor comprises: a surface acoustic wave substrate; a slider provided with an applied pressure; a driving interdigital electrode connected to an external power supply for generating a driving surface acoustic wave on a surface so as to drive the slider by a frictional force which is generated on a contact surface of the slider with the surface acoustic wave substrate based on the surface acoustic wave and the applied pressure; recovery interdigital electrodes placed forward and backward in the direction of travel of the surface acoustic wave for recovering energy of a surface acoustic wave unused to drive the slider, and for using that energy to generate a surface acoustic wave; and phase adjusting means for matching the phase of a surface acoustic wave generated by the recovery interdigital electrodes to the phase of the driving surface acoustic wave generated by the driving interdigital electrode.
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