Abstract
A surface acoustic wave element according to the present invention has a structure including a hard layer containing a composition component essentially consisting of at least one of diamond and a diamond-like carbon film [2], a piezoelectric layer formed on the hard layer [4], a silicon dioxide (SiO₂) [5] layer formed on the piezoelectric layer, and electrodes combined with the piezoelectric layer to perform electro-mechanical conversion. The surface acoustic wave element having the above structure according to the present invention has a larger electro-mechanical coupling coefficient and a higher surface acoustic wave propagation velocity than those of a conventional surface acoustic wave element having no silicon dioxide layer, thereby obtaining a surface acoustic wave element operated in a high-frequency range. In particular, the electro-mechanical coupling element is increased. The silicon dioxide (SiO₂) layer is an electric insulator and rarely reacts with moisture or an acid. The silicon dioxide layer can protect the piezoelectric layer and the electrodes from an external environment, thereby providing a surface acoustic wave element having good high-frequency characteristics and a high resistance to environment.
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