Abstract
We have investigated the effect of nitrogen doping on the behavior of hysteresis curve and its suppression of temperature instability in amorphous InGaZnO thin-film transistors (a-IGZO TFTs). The in situ nitrogen doping reduced the temperature induced abnormal sub threshold leakage current and traps generation. Large falling-rate (FR) ∼ 0.26 eV V−1, low activation energy (Ea) ∼ 0.617 eV and a small hysteresis compared to the pure a-IGZO TFTs, shows the best immunity to thermal instability. This is mainly attributed to the reduction of interface trap density and oxygen vacancies due to the passivation of defects and/dangling bonds.
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