Abstract
Addressable trapping and manipulations of micro/nano-scale bioparticles is often necessary and critically important in microfluidic devices for biological and medical applications. While GHz bulk-acoustic-wave (BAW) resonators have shown their excellent performance in trapping, rotating, and focusing particles down to nanometers, arraying them for addressable manipulation is a great challenge due to the crosstalk among resonators. This paper presents the electrical and mechanical crosstalk analysis to GHz BAW array with proposed circuit-level models. Crosstalk mechanisms are thoroughly revealed, which contribute to clarify the design rules of GHz BAW array with low crosstalk. A 4 x 4 BAW array chip is designed and experimental results show the chip can achieve addressable control with negligible crosstalk, demonstrating the rationality of the analysis. The crosstalk analysis, as well as the derived design rules, will lead to the design of a high-performance GHz BAW array with great potential for applications that require massive, addressable, and precise particle manipulation. [2021-0236]
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