Abstract

Epitaxial graphene layers are produced with the aid of thermal destruction of the surface of a semi-insulating SiC substrate. Raman spectroscopy and atomic-force microscopy are employed in the study of the film homogeneity. A prototype of the gas sensor based on the films is fabricated. The device is sensitive to the NO2 molecules at a level of 5 ppb (five particles per billion). A possibility of the industrial application of the sensor is discussed.

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