Abstract
High-quality single-crystal molybdenum (Mo) fabricated by a secondary recrystallization method has been polished with a new polishing technique. The superpolished surface of the Mo single crystal has a surface roughness of 3.5 Å rms. This superpolished single-crystal Mo has been used for a high-power electron beam pumped argon excimer laser (λ=126 nm) as a cavity mirror. Peak output power of more than 3 MW has been achieved without any damage to the mirror surface.
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