Abstract
As a non-destructive detection technique for measuring parallel transparent optics, wavelength-shifting interferometry provides a separation basis for multiple measured surfaces by assigning different frequencies to the interference harmonics based on their optical-path-difference. However, the non-synchronous sampling and spectral aliasing can decrease the measurement accuracy. Therefore, an approximate entropy algorithm is utilized to determine the sampling performance. Then the frequency search accuracy is guaranteed by the zero-padding method, and the all-phase Fourier transform method is introduced to correct the harmonic frequencies and amplitudes, where the spectral aliasing problem is solved by the relative amplitude analysis. So efficient surface measurement combining the above advantages is realized, and the validity is verified by simulation analysis of different profile features and de-tuning errors. The effectiveness of the proposed method is fully confirmed by the repetitive measurements on two parallel plates in the experiments.
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