Abstract
The purpose of this paper is to report the design, fabrication and characterization of silicon-based microfluidic channels with superhydrophobic walls for energy harvesting. We present the fabrication step of silicon based streaming current energy harvester and the nanostructuration of the microchannel walls. We characterize the superhydrophobic properties of the surface in a closed system. Our preliminary results on the electrical characterization of the device show a 43% increase of power harvested with our superhydrophobic surface compared to a planar hydrophobic surface.
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