Abstract
Three-dimensional surface structures composed of micropillars with different diameters (8โ110 ยตm) and interpillar distances were fabricated using a thick-film photoresist, and the surface was modified with a hydrophobic plasma-polymerized film using hexamethyldisiloxane (HMDS) as a monomer. Surface hydrophobicity was examined by measuring contact angle using a pure water droplet. The effect of adding ethanol was also examined. Water static contact angle increased significantly on the surface coated with the HMDS plasma polymer. Structural parameters, including the diameter and height of the micropillars, were changed, as was the interpillar distance. The dependence of apparent contact angle on these parameters was explained using Cassie's and Wenzel's models.
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