Abstract
We investigate the non-linear mechanical dynamics of a nano-optomechanical mirror formed by a suspended membrane pierced by a photonic crystal. By applying to the mirror a periodic electrostatic force induced by interdigitated electrodes integrated below the membrane, we evidence superharmonic resonances of our nano-electro-mechanical system; the constant phase shift of the oscillator across the resonance tongues is observed on the onset of principal harmonic and subharmonic excitation regimes.
Highlights
We investigate the non-linear mechanical dynamics of a nano-optomechanical mirror formed by a suspended membrane pierced by a photonic crystal
to the mirror a periodic electrostatic force induced by interdigitated electrodes integrated below the membrane
the constant phase shift of the oscillator across the resonance tongues is observed on the onset
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