Abstract
CN x/ZrN multilayers were prepared by a dual-cathode unbalanced DC magnetron sputtering system. The results showed that under proper deposition conditions, the multilayer coatings were dense and fully crystalline with hardness exceeding 40 GPa and elastic modulus over 400 GPa. X-ray diffraction studies showed that there is a strong correlation between coating hardness and the occurrence of (111) texture of ZrN. Some crystalline regions going through the multilayers were clearly observed from the cross-sectional high resolution transmission electron microscopy image. Two extra d-spacings were obtained from the diffraction pattern that do not belong to any known d-spacing for ZrN, but match with two calculated d-spacings for β-C 3N 4.
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