Abstract
A specially constructed hollow cathode, which makes it possible to produce a superdense glow discharge whose current density reaches up to 10 A/cm 2, has been developed. The superdense glow mode occurs independently of the cathode cavity size and the gas pressure, even if the diameter of the cavity is reduced to 0.23 cm. The characteristics of superdense hollow cathode glow discharge and its application to new types of ion sources (a very compact ion source and a large diameter ion beam source) are discussed.
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Schedule a callMore From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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