Abstract

We have characterized the photon response of superconducting tunnel junctions in the extreme ultraviolet energy range below 100 eV with a pulsed 355 nm laser. The detectors are operated at rates up to 5000 counts/s, are very linear in energy and have an energy resolution between 0.9 and 2 eV. We observe multiple peaks that correspond to an integer number of photons with a Poissonian probability distribution and that can be used for high-accuracy energy calibration. The uncertainty of the centroid depends on the detector resolution and the counting statistics and can be as low as 1 meV for well-separated peaks with $$>$$ 10 $$^5$$ counts. We discuss the precision of the peak centroid as a function of detector resolution and total number of counts and the accuracy of the energy calibration.

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