Abstract

Niobium nitride, NbN, films with thicknesses ranging from 5000 Å down to approximately 10 Å have been prepared by a high purity reactive sputtering process and their superconducting properties measured. A depression in transition temperature, T c, with decreasing thickness has been observed, starting from a maximum T c of ≈15.2 K in the thicker films down to ≈6.5 K in a 25 Å film. The critical current vs. applied magnetic field curves were found to be independent of thickness or even to increase slightly down to a thickness of 100 Å. Below this point the critical current at high fields decreased sharply, the films apparently becoming discontinuous. The average resistivity of the NbN films was ≈ 1000 μ ohm cm.

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