Abstract
High quality epitaxial YBa2Cu3O7-x thin films have been successfully prepared by dc magnetron sputtering deposition, on (100) and (110) aligned SrTiO3, LaAlO3 and yttria-stabilized zirconia (YSZ) substrates. The films showed zero resistance around 90 K and had a Jc (at 77 K, H = 0) over 106 A/cm2. It was found that superconducting properties and structures of the films were strongly dependent on oxygen pressure and substrate temperature. The epitaxial structure of the films have been studied by x-ray diffraction, Rutherford backscattering and channeling spectroscopy, x-ray double-crystal diffraction and transmission electron microscopy. The experimental results demonstrated that the epitaxial YBa2Cu3O7-x films had excellent superconducting properties and quite perfect structure.
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