Abstract

NbN thin films ( a few nm thick) are deposited on MgO substrates and patterned into meander lines to make single photon detectors at telecommunication wavebands of 1310 nm and 1550 nm. Typically the width of the meander line is 100 nm, and the detection area is 10× 10 ¿m <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> . The detector efficiency, dark count rate, time jitter, and response speed of the single photon detectors are discussed. Possible practical applications of these devices are explored.

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