Abstract
Superconducting nanowire single-photon detectors (SNSPDs) made of ultrathin δ-NbN films have been widely applied in both visible and infrared wavelengths. For mid-infrared (MIR) wavelengths, SNSPDs made of tungsten silicide films with a lower critical temperature were reported up to 9.9 μm wavelength. In this study, we demonstrate the potential of NbN-SNSPDs for use in MIR applications. SNSPDs made of γ-Nb4N3 films (critical temperature of 5.1 K for 6.5 nm thick films) instead of δ-NbN films were fabricated. The dependence of the normalized detection efficiency on the bias current indicated a clear trend toward a saturated plateau for wavelengths up to 2145 nm. The calculated cut-off wavelengths indicated the possibility of using γ-Nb4N3 SNSPDs for longer MIR wavelengths.
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