Abstract
Quarter-wavelength superconducting spiral resonators have been used to realize a coplanar waveguide bandpass filter and bandstop filter around the center frequency of 6 GHz. These compact coplanar waveguide filters have been made from 300-nm-thick NbTiN thin film on a 525-μm-thick silicon substrate. The bandpass filter is a six-pole Chebyshev filter with two zero transmissions due to nonadjacent coupling in its structure. Accurately microfabricated air-bridges have been used to suppress the undesired slot-line mode in this filter. The bandstop filter is a very simple two-pole structure that used wire bonding to suppress the slot-line mode. Measurements have been done at a temperature of 4.2 K in liquid helium. Good agreement between simulation and measurement results has been found.
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