Abstract
An energy recovery linac (ERL)-based free electron laser (FEL) is a possible candidate of a tens of kW EUV source and open the era for next generation EUV-lithography. We have designed the 10 mA class ERL-based EUV-FEL source to generate more than 10 kW power. One of the key technologies is CW superconducting cavities to realize the energy recovery of high beam current of more than 10 mA by suppressing HOMs and high gradient acceleration of higher than 12 MV/m. This CW superconducting cavity had been developed through the construction of the Compact ERL facility in KEK and it successfully achieved the energy recovery of 1 mA CW beam until now. In this talk, first we express our design strategies of SRF cavities of the main linac of ERL-EUV light sources not only to suppress the HOMs but also to overcome the field emission problem by modifying the main linac cavity of Compact ERL more sophisticatedly. Next we show the recent development works for ERL-EUV superconducting cavity about HOM damper, cryomodule, and its clean string-assembly work by using horizontal test stand.
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