Abstract
A new super resolution imaging technique which potentially enables sub-µm spatial resolution, using a detector of pixels much larger than the spatial resolution, is proposed. The method utilizes sample scanning through a large number of identical X-ray microprobes periodically spaced (the period corresponds to a multiple of the pixel size), which reduces drastically the scanning time. The information about the sample illuminated by the microprobes is stored by large detector pixels. Using these data and sample position information, a super-resolution image reconstruction is performed. With a one-dimensional (1D) high aspect ratio nickel single lens array designed for theoretically expected sub-µm microprobes at 17 keV and fabricated by deep X-ray lithography and electroforming technique, 2 µm X-ray microprobes with a period of 10 µm were achieved. We performed a first experiment at KARA synchrotron facility, and it was demonstrated that the smallest structure of a test pattern with a size of 1.5 µm could be easily resolved by using images generated from a detector having a pixel size of 10.4 µm. This new approach has a great potential for providing a new microscopic imaging modality with a large field of view and short scan time.
Highlights
X-ray characterisation of micro lens array at KARA synchrotron facility
Super-resolution image reconstruction was performed using ten low-resolution images and the 1.5 μm feature of a resolution test pattern could be resolved, which demonstrated a spatial resolution of 1.5 μm or even better
In comparison with conventional scanning transmission microscopy, in the present method, sample scanning was performed through 250 identical microprobes which drastically reduce the scanning time
Summary
X-ray characterisation of micro lens array at KARA synchrotron facility. An X-ray characterization of the micro lens array was performed at the wiggler IMAGE beamline at the KARA synchrotron radiation facility (KIT, Karlsruhe, Germany). A 74 μm LSO:Tb scintillator combined with 10 x magnification optics and a PCO.edge5.5 sCMOS camera (PCO AG, Kelheim, Germany) with an effective pixel size of 0.65 μm was used. The FoV of the detector were 1.66 mm (vertical) × 1.4 mm (horizontal). The micro lens array was oriented vertically since the source size in the vertical direction is much smaller than the horizontal one. The resulting focal distance was 67 mm, which was in a good agreement with the theoretical value
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