Abstract
In this work we demonstrate high values of electromechanical coupling coefficient ( $k_{t}^{2}$ ) exceeding 4.9% in 1- $\mu \text {m}$ thick Aluminum Nitride (AlN) two-dimensional-mode resonators (2DMRs) operating around 3.2 GHz. Such a high $k_{t}^{2}$ -value, which is attained thanks to the transduction of the resonators through both the $d_{33}$ and $d_{31}$ piezoelectric coefficients of AlN, enables low-power oscillators and low insertion-loss filters, operating in the Super-High-Frequency (SHF) range.
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