Summary of ISO/TC 201 Standard: VII ISO 15472 : 2001—surface chemical analysis—x‐ray photoelectron spectrometers—calibration of energy scales

Abstract

This international standard specifies a method for calibrating the binding energy scales of x-ray photoelectron spectrometers, for general analytical purposes, using unmonochromated Al or Mg x-rays or monochromated Al x-rays. It is only applicable to instruments that have an ion gun for sputter cleaning. This international standard further specifies a method to establish a calibration schedule, to test for the binding energy scale linearity at one intermediate energy, to confirm the uncertainty of the scale calibration at one low and one high binding energy value, to correct for small drifts of that scale and to define the expanded uncertainty of the calibration of the binding energy scale for a confidence level of 95%. This uncertainty includes contributions for behaviour observed in inter-laboratory studies but does not cover all of the defects that could occur. This international standard is not applicable to instruments with binding energy scale errors that are significantly non-linear with energy, to instruments operated in the constant retardation ratio mode at retardation ratios of <10, to instruments with a spectrometer resolution worse than 1.5 eV or to instruments requiring tolerance limits of ±0.03 eV or less. This international standard does not provide a full calibration check, which would confirm the energy measured at each addressable point on the energy scale and would have to be performed in accordance with the manufacturer's recommended procedures. © Crown Copyright 2001. Published by John Wiley & Sons, Ltd.