Abstract
AbstractThis International Standard specifies a method for calibrating the kinetic energy scale of Auger electron spectrometers with an uncertainty of 3 eV for general analytical use for identifying elements at surfaces. It is suitable for instruments used in either the direct mode or the differential mode where the resolution is equal to or less than 0.5% and the modulation amplitude for the differential mode, if used, is 2 eV peak to peak. The spectrometer shall be equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy. This International Standard further specifies a calibration schedule. Crown Copyright © 2003. Published by John Wiley & Sons, Ltd.
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