Abstract
Ni 50Mn 30Ga 20 films of 13 μm thickness were fabricated by DC magnetron sputtering on unheated glass substrates. The As-deposited films are partially crystalline and crystallize during rapid annealing. The successive appearance of ferromagnetic and shape memory properties was observed as the annealing temperature was increased. Ferromagnetic properties evolved after annealing at 400 °C for 0.5 h, while thermal annealing of at least 600 °C for 0.5 h led to polycrystalline films that transformed reversibly and martensitically as shown by structural analysis and differential scanning calorimetry and confirmed by mechanical spectroscopy data. Magnetic measurements also revealed the influence of the post deposition annealing on the ferromagnetic hysteresis. Transition temperatures and reaction enthalpies of the martensitic phase transformation were strongly influenced by the temperature of the rapid annealing process. X-ray absorption fine-structure (XAFS) spectroscopy proved these changes to be related to the change in the chemical order. It is proposed that the annealing data reflect the evolution of the crystalline state. Ferromagnetic order is established already in nano-grained samples whereas the shape memory effect is only observed above a critical grain size.
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