Abstract
Amorphous carbon films were examined by low frequency scanning-probe acoustic microscopy (LF-SPAM). Local elastic properties as well as topography were imaged in the acoustic mode. Two kinds of subsurface defects were revealed by the LF-SPAM method. The influence of the subsurface defects on the elastic properties was also discussed. The ability to image subsurface defects was dependent on the scan area and the scan speed. Our results showed that the low frequency scanning-probe acoustic microscopy is a useful method for imaging subsurface defects with high resolution.
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