Abstract
Quantitative lattice-site determination of manganese in spatially inhomogeneous low-temperature GaN is performed by channeling enhanced microanalysis. The technique allows one to measure the substitutional-to-interstitial ratio at a spatial resolution suitable to study individual single-crystalline columns. Numerical fitting to full dynamical Bloch wave calculations yields a fraction of (95.6±6.3)% manganese incorporated on substitutional sites.
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