Abstract

A synchronously pumped dye laser with saturable absorber jet and cavity dumper is used as the source for producing a seed beam for excimer amplifiers. An optical fiber after the dye laser and a grating pair are used to compress the dye laser pulse to 250 fsec. A two stage dye amplifier brings the pulse to about 0.1 mJ at 745.2 nm. Frequency doubling followed by summing the second harmonic with the fundamental in two KDP crystals produces radiation at 248.4 nm to be amplified in two KrF amplifiers. The UV pulse duration was measured after the first amplifier to be 450±150 fsec. The pulse energy was 23±2 mJ, and the power therefore, was nominally ∼50 GW.

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