Abstract
Conventional techniques that measure the concentration of light elements in metallic materials lack high-resolution performance due to their intrinsic limitation of sensitivity. In that context, scanning microwave microscopy has the potential to significantly enhance the quantification of element distribution due to its ability to perform a tomographic investigation of the sample. Scanning microwave microscopy associates the local electromagnetic measurement and the nanoscale resolution of an atomic force microscope. This technique allows the simultaneous characterization of oxygen concentration as well as local mechanical properties by microwave phase shift and amplitude signal, respectively. The technique was calibrated by comparison with nuclear reaction analysis and nanoindentation measurement. We demonstrated the reliability of the scanning microwave technique by studying thin oxygen-enriched layers on a Ti-6Al-4V alloy. This innovative approach opens novel possibilities for the indirect quantification of light chemical element diffusion in metallic materials. This technique is applicable to the control and optimization of industrial processes.
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