Abstract
Basic technology for the fabrication of submicron surface reliefs in epitaxial GaAs structures with thin AlGaAs stop layers has been developed using electron-beam lithography. High sensitivity of the characteristics of vertical-cavity surface-emitting lasers (VCSELs) with respect to the level of optical losses allows this technology to be used for controlling the mode composition and stabilizing the polarization of VCSEL radiation.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
