Submicron scale image observation with a grazing incidence reflection-type single-shot soft X-ray microscope

Abstract

A grazing incidence reflection-type soft X-ray microscope, using a Fresnel zone plate and a soft X-ray laser with wavelength 13.9 nm and pulse width 7 ps, was developed. Submicron size groove structures made on a Pt film were clearly captured at a single shot exposure, with spatial resolution of about 360 nm. A wide field view of 100 µm square was secured under the Kohler illumination. This microscope also had a large depth of focus of more than 100 µm and was proven to have a sufficient performance for observing surface morphological changes.