Abstract
A table-top sub-micron large motion high Performance modular manufacturing system is discussed using several improvements to commercial Sawyer planar motor technology. Commercial planar Sawyer motors provide uniform Performance over their entire workspace, offering fairly high speeds, accelerations, accuracy and resolution. They also offer mechanical and kinematic simplicity, modularity, large motion ranges, and a short path to mechanical ground. On the other hand, primarily because they are operated as open-loop step motors, they can miss steps, have long settling times, and fall short of their potential capabilities. These short Comings are overcome and the system is improved by: (i) A novel very high resolution (0.4 Jim) Sawyer planar sensor which can be used for electronic commutation and closed-loop control. (ii) Improved accuracy by thermal deformation compensation. (iii) Motor speed and force improvement by a new composite structure. (iv) Motion extension to 6 degrees-of-freedom using the same planar motor technology with a simple modular parallel manipulator configuration.
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