Abstract
A new submicron-order dimensional measurement system using a two-laser-beam scanning method and measurement results are described. Two fine spot beams, slightly separated, which are generated from an acoustoopic deflector, are scanned at 0.02 μm steps on an object by driving a signal which has two frequency components. The synthetic light intensity distribution of the two beams is adjusted to a particular distribution according to the dimension to be measured by varying that of the frequency. The shape of the reflected light intensity signal is adjusted to the particular U-shaped signal by controlling the synthetic light intensity distribution. From the value of the frequency which controls the U-shaped signal, the submicron dimentions can be measured with accuracies of ±0.02 μm.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
