Abstract
Submicrometer Hall sensors, with Hall cross width of ~250 nm, were fabricated from InAs/AlSb quantum well semiconductor heterostructures. The room-temperature device characteristics were examined by experimental Hall effect and electronic noise measurements combined with analytical calculations. The noise-equivalent magnetic moment resolution of the order of 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</sup> mu <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">B</sub> /radicHz was obtained at frequencies above ~1 kHz. We show that the devices can achieve single superparamagnetic nanoparticle detection and thus be employed in experiments involving single magnetically labeled biomolecule detection.
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