Abstract
Laser self-mixing interference (SMI) wave plate measurement method is a burgeoning technique for its simplicity and efficiency. But for the non-coated sample, the reflected light from the surface can seriously affect the measurement results. To analyze the reason theoretically, a self-consistent model for laser operation with a sub-external and an external cavity is established, and the sub-external cavity formed by the sample and a cavity mirror is proved to be the main error source. A synchronous tuning method is proposed to eliminate the sub-external cavity effect. Experiments are carried out on the synchronously tuning double external cavities self-mixing interference system, and the error of the system is in the range of −0.435°∼0.387° compared with the ellipsometer. The research plays an important role in improving the performance and enlarging the application range of the laser self-mixing interference system.
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