Abstract
A sub-atmospheric (SA) pressure gas source, based on the reversible adsorption of hydride gas onto a high surface area substrate within a cylinder, has been developed for the safe storage and delivery of high-purity arsine and phosphine for MOCVD processes. SA pressure and high-pressure sources are compared with respect to gas delivery and purity, risk reduction, and cost benefits. Gas analysis and performance of epi-structures grown with SA pressure cylinders confirm that the hydride gas delivered meets the purity requirements of MOCVD processes. Further, the low gas release rates measured from 2.2 and 49 l SA pressure cylinders indicate that the technology can be scaled up without additional safety risk.
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