Abstract
The GaN-based membrane high contrast grating (HCG) reflectors have been fabricated and investigated. The structural parameters including grating periods, grating height, filling factors and air-gap height were calculated to realize high reflectivity spectra with broad bandwidth by the rigorous coupled-wave analysis and finite-difference time-domain method. Based on the optimized simulation results, the GaN-based membrane HCGs were fabricated by e-beam lithography and focused-ion beam process. The fabricated GaN-based membrane HCG reflectors revealed high reflectivity at 460 nm band with large stopband width of 60 nm in the TE polarization measured by using the micro-reflectivity spectrometer. The experimental results also showed a good agreement with simulated ones. We believe this study will be helpful for development of the GaN-based novel light emitting devices in the blue or UV region.
Highlights
Over the past decade, GaN-based optoelectronic devices such as resonant cavity lightemitting diodes (RCLEDs) and vertical cavity surface emitting lasers (VCSELs) have been investigated and developed for many different applications [1,2,3,4]
Based on the optimized simulation results, the GaN-based membrane high contrast grating (HCG) were fabricated by e-beam lithography and focused-ion beam process
The fabricated GaN-based membrane HCG reflectors revealed high reflectivity at 460 nm band with large stopband width of 60 nm in the TE polarization measured by using the micro-reflectivity spectrometer
Summary
GaN-based optoelectronic devices such as resonant cavity lightemitting diodes (RCLEDs) and vertical cavity surface emitting lasers (VCSELs) have been investigated and developed for many different applications [1,2,3,4]. III-N based DBRs were challenged to fabricate due to the lattice-mismatch problem and small index difference between GaN and AlN material systems. The epitaxial growth of crack-free high reflectivity GaN/AlN DBRs have been demonstrated by insertion of the superlattice for strain relaxation in 2006 [5]. The high contrast grating (HCG) reflectors have been recently developed and investigated because of their superior properties such as highly reflectivity with large bandwidth, polarization control and light mass for fast tuning of cavity modes [6,7,8,9]. HCG VCSELs have further been explored to operate at 1550 nm for optical communications and wavelength division multiplexing applications [12, 13]
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