Abstract
AbstractBy launching new processes introduced by nano science into much more conventional industrial applications fast, robust and economical reasonable inspection methods are required for process control and quality assurance. Coming from high tech industries e.g. semiconductor industries the methods available for thin film characterization and quality control are complex and often require scientific skilled personal. High frequency eddy current spectroscopy in reflection or transmission configuration allows a contactless measurement of e.g. copper thin films on silicon with a thickness resolution better that 5 nm. Due to the insensitivity of the transmission mode to dislocations or slight tilting of the sample the high frequency eddy current method is a practicable method for thin film characterization under industrial environment.
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