Sub-second quantum cascade laser based infrared spectroscopic ellipsometry.

Abstract

Laser-based infrared spectroscopic ellipsometry (SE) is demonstrated for the first time, to the best of our knowledge, by applying a tunable quantum cascade laser (QCL) as a mid-infrared light source. The fast tunability of the employed QCL, combined with phase-modulated polarization, enabled the acquisition of broadband (900-1204 cm-1), high-resolution (1 cm-1) ellipsometry spectra in less than 1 second. A comparison to a conventional Fourier-transform spectrometer-based IR ellipsometer resulted in an improved signal-to-noise ratio (SNR) by a factor of at least 290. The ellipsometry setup was finally applied for the real-time monitoring of molecular reorientation during the stretching process of an anisotropic polypropylene film, thereby illustrating the advantage of sub-second time resolution. The developed method exceeds existing instrumentation by its fast acquisition and high SNR, which could open up a set of new applications of SE such as ellipsometric inline process monitoring and quality control.